In semiconductor manufacturing equipment performing nanometer-scale fine processing, precise control of process parameters such as temperature, pressure, and gas concentration is indispensable. Proportional control solenoid valves can accurately adjust flow rates from small to large, contributing to precise process control and high-purity fluid control.
Flow and Pressure Control for Corrosive Gases
Flow and Pressure Control for Purge and Carrier Gases
Semiconductor wafer handling systems are designed to safely transport wafers during the manufacturing process. They protect wafers from impurities and oxidation through nitrogen gas purging. Proportional control solenoid valves precisely control the flow rate and pressure of the purge gas, contributing to highly reliable wafer handling.
Flow and Pressure Control for Air/Nitrogen Gas
Mass flow controllers are devices that precisely control the flow rate of gases used in semiconductor manufacturing processes. Proportional control solenoid valves continuously adjust their valve opening via electrical signals, quickly achieving and stabilizing the target flow rate.
Metal Seal Type
Rubber Seal Type
