| Valve type | Proportional solenoid valve |
|---|---|
| Valve operation | Normally closed when de-energized(N.C.) |
Standard compatible gas types | Nitrogen , Air(dry) , Argon , Nitrous oxide |
Standard full-scale flow rate | 12.00L/min (Nitrogen conversion value) |
| Control | Control range:2 to 100%F.S.(0.20 to 12.00L/min) Response:Within 2.0s at setting ±2%F.S.(Typical) Repeatability:±5.0%R.D.(6.00<Q≦12.00L/min) ±3.0%F.S.(0.20<Q≦6.00L/min) reproducibility：±1.5%F.S. |
| Pressure | Operating differential pressure:0.15 to 0.3MPaG Pressure resistance:0.3MPaG (flow sensor section 0.05MpaG) |
Allowable Operating temperature | 0 to 50℃ |
Allowable Operating humidity | 30 to 85%RH(non-condensing) |
| Flowrate setup | Setup resolution:0.01L/min Setup input voltage: 0~5 VDC |
Communication system | RS232C cmmunication(TTL LEVEL ) |
| Connector connection | PA HEADER (SMT SIDE)：SM05B-PASS(JST) Connection:Housing PAP-05-S(JST) Contact SPHD-002T-P0.5(JST) |
Material of gas-contacting parts | PBT、Stainless steel、Brass、Viton、 Silicon(sensor section) |
| Tube connection port | IN：6mmφ、OUT：8ｍｍφ |
| Mounting orientation | Free |
| Mass(weight) | Approx. 200g |
