Ultrasonic Mass Flow Controller
Ultrasonic Mass Flow Controller

UMFC Series

Main Specifications

Model UMFC-0005
Sensor Type Ultrasonic Method
Valve Type Direct-acting Solenoid Valve
Valve Operation Normally Closed (N.C.)
Applicable Fluid Nitrogen, Air, Oxygen
Fluid Temperature 0 to 50°C
Rated Voltage 24V
Full-scale Flow Rate 5 L/min
Flow
Control Range
(Air)
Control Range 4 ~ 100%F.S.

(0.2 ~ 5 L/min)

Response Within 5 seconds to ±2%F.S. of the set flow
Flow
Control Accuracy
(at 20°C)
±2.0%R.D.

(0.2 ≤ Q ≤ 1.25 L/min)

±3.0%F.S.

(1.25 < Q ≤ 3 L/min)

±5%F.S.

(3 < Q ≤ 5 L/min)

Repeatability ±1.5%F.S.
Concentration Measurement
Range
75 ~ 100%
Measurement
Accuracy
±4%
Repeatability ±1.5%
Pressure Operating
Differential Pressure Range
0.05 ~ 0.2 MPaG
Pressure Resistance 0.3 MPaG
Guaranteed Temperature Range for Accuracy 10 to 40°C
Allowable Operating Temperature Range 0 to 50°C
Allowable Operating Humidity Range 30 ~ 85%RH (non-condensing)
Flowrate Setup
(Options)
Analog Input Input Range: 1 ~ 5V
Serial Communication Asynchronous Serial (UART)
Setup Resolution 0.05 L/min
Connector Base Post BM08B-GHS-TBT (JST)
Housing GHR-08V
Contact SSHL-002T-P0.2
Gas-contact Material for Valve PPS, Stainless Steel, Fluororubber, Brass
Connection Ports IN: φ6   OUT: φ6
Mounting Orientation Any orientation
Weight Approx. 110 g

External Dimensions (mm)

For improvement and other purposes, specifications, dimensions, etc. of this product are subject to change without notice.

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