Compact Mass Flow Controller

SMFC Series

Main Specifications

Model Number SMFC-0005 SMFC-0020
Valve type Direct Operated solenoid valve
Valve Operation NC(Normally Closed)
Standard compatible gas type Air/O2/N2
Fluid Temperature 0 ~ 50℃
Rated Voltage 12V DC
Standard full-scale flow rate 5L/min 20L/min
Flow control range
Control range 4~100%F.S.




Response Within 2.0s at setting ±2%F.S.(Typical)








reproducibility ±1.5%F.S.
Pressure Operating differential pressure 0.05~0.2MPaG0.15~0.3MPaG
Pressure resistance 0.3MPaG
(flow sensor section 0.05MpaG)
Allowable Operating temperature 5 ~ 50℃
Allowable Operating humidity 30 ~ 85%RH(non-condensing)
Flowrate setup
Analog input Setup input voltage 1~5V
Serial communication RS232C
Setup resolution
Connector connection Header S10B-PH(JST)
Material of gas-contacting parts PPS/Stainless steel/Brass/Viton/Silicon(sensor section)
Fitting Size IN:φ4 or φ6 OUT:φ4 or φ6
Mounting Orientation at will
Mass(weight) Approx. 200g

External Dimensions

For improvement and other purposes, specifications, dimensions, etc. of this product are subject to change without notice.

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